High Temperature Stability of CrTiAlSiN Nanocomposite Thin Films
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 97 === The high temperature oxidation behavior of CrTiAlSiN coatings was studied. These coating were deposited on silicon substrates by us cathodic-arc deposition system with lateral rotating arc cathodes. Titanium, Chromium and Al88Si12 cathodes were used for the de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s27q65 |