Vapor-Liquid Equilibria for the binary systems of PGME + water and PGME + alcohols
碩士 === 明新科技大學 === 化學工程研究所 === 97 === A liquid mixture consisted of propylene glycol monomethyl ether (PGME) and propylene glycol methyl ether acetate (PGMEA) is widely used as photoresist edge bead remover (EBR) in the color crystal displays (LCD) manufacturing process. It is important to recover th...
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| Format: | Others |
| Language: | zh-TW |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29948710352815056654 |