A Study on the Process Equipment Maintenance for Semiconductor Foundry by FMEA Approach
碩士 === 國立成功大學 === 工學院工程管理專班 === 97 === The FMEA (Failure Mode and Effect Analysis) approach is usually used to analyze the potential failure mode of a system and to propose the proper improvement action for preventing the occurrence of specified failure. It is one of the key technology for the 12&qu...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68537838841394826532 |