Deposition of high-temperature protective films containing silicon and carbon
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 97 === The study of modified diamond-like carbon (DLC) films is divided into two sections. The first part is using sputtering deposition technique to deposit hydrogen-free DLC films. And the second part is using plasma enhanced chemical vapor deposition technique to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94293745176098316197 |