Characterization of BaTiO3 in (BaTiO3/BaSnO3)n multilayers
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 97 === In this study, (BaTiO3/BaSnO3)n multilayers are prepared by RF magnetron sputtering on Pt/Ti/SiO2/Si substrate. Structure of crystallization, surface morphology and electric properties are characterized as function of non-uniform strain which caused by depo...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22680875360183733342 |