| Summary: | 碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 97 === In this study, (BaTiO3/BaSnO3)n multilayers are prepared by RF magnetron sputtering on Pt/Ti/SiO2/Si substrate. Structure of crystallization, surface morphology and electric properties are characterized as function of non-uniform strain which caused by depostition and thermal stress.
The results show that the structure of BaTiO3 thin film annealed above 600 ℃ for 10 min is perovskite tetragonal structure, but the crystal of multilayers find as annealed at a higher temperature should be caused by tiny grain size induced by strain. Crevices are found on the top layer for a 4 layers structure which maybe caused by internal stress. However, a thinner top layer can avoid crevices formation at high stress level.
By P-E measurement, the Curie temperature of BaTiO3 thin film is about 120 ℃. However, the Curie temperature of multilayers is lower than 10 ℃ because it shows paraelectric property at 10 ℃.
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