Study on Layer-by-Layer Growth Mechanism of BTO/SRO Epitaxial Thin Films
碩士 === 國立成功大學 === 物理學系碩博士班 === 97 === In this study, we deposited SrRuO3 (SRO) on SrTiO3 (STO) substrate to investigate how the parameters of sputter system affected the growth mode during the thin-film deposition process. The objective is to build a rule for controlling deposition parameters so tha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58000994848432024082 |