A Study of Annealing Effect of Zn-doped ZnO
碩士 === 國立成功大學 === 物理學系碩博士班 === 97 === In our study, pure, 2% and 5% zinc-doped zinc oxide (ZnO:Zn) thin films were deposited on silicon substrates by RF magnetron co-sputtering method under argon. Samples were annealed under air, nitrogen and oxygen atmospheres at annealing temperature ranging from...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60931419952738785148 |