Characterization of Liquid-phase-deposited SrTiO3 on GaN
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === Titanium dioxide shows a high dielectric constant for dielectric applications. Besides, strontium can create additional oxygen vacancies that can enhance dielectric constant. In this study, we prepared SrTiO3 film by liquid phase deposition which is a novel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97710047227062471464 |