Growth of Diamond Films by DC-PECVD and Conductivity Measurement of Hydrogenated Diamond Surface
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === We have grown poly-crystalline diamond films by means of a home-built DC-PECVD. We observed the film variation by fine-tuning the growth parameters such as discharge current density, feeding gas concentration, substrate materials etc. Diamond films can be gr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57543633440533563414 |