Using Spin-on Dopant Technique to Fabricate n+-p--p+ Silicon Optical Modulators and Solar Cells
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === In this thesis, the Si-based infrared optical modulators working at the wavelength of 1.55 �慆 and solar cells have been fabricated by SOD technique. For optical modulators, their optical modulation mechanism is based on the free carrier dispersion effect, wh...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/24238107614890724883 |