Using Spin-on Dopant Technique to Fabricate n+-p--p+ Silicon Optical Modulators and Solar Cells
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === In this thesis, the Si-based infrared optical modulators working at the wavelength of 1.55 �慆 and solar cells have been fabricated by SOD technique. For optical modulators, their optical modulation mechanism is based on the free carrier dispersion effect, wh...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/24238107614890724883 |