Low frequency noise of chlorine-treated GaN/AlGaN MSM-photodetectors
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === To improve the optoelectronic characteristics and low frequency noise of GaN/AlGaN metal-semiconductor-metal photodetectors (MSM-PDs), the chlorination surface treatment is applied in fabrication. Furthermore, a photoelectrochemical oxidation method is used...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39002740444683125017 |