Studies of ZnO-Based Transparent Thin-Film Transistor
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 97 === Abstract In this thesis, we demonstrate an all sputtering, all lithography technology process to fabricate low voltage operational, enhancement mode N-Type ZnO-TFT by using high-k material (Y2O3) as the gate oxide. The effects of different processing parameter...
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42233240051946527537 |