The Effects of Nano Scratch on Groove Geometry and Phase Transformation of Silicon
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 97 === In this investigation, the nano indentation is used to investigate the geometry of nano scratch grooves on amorphous aluminum film. The silicon phase transformations are also studied under different scratching conditions on the same machine. A Berkovich diamon...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08418698826216131720 |