Effects of Load and Annealing Temperature on The Nanoindentation Behaviour and Microstructural Evolution of Single-Crystal Silicon
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 97 === The study investigates the nano-mechanical properties of single-crystal silicon using a nanoindentation technique. The indented position is accurately identified using a proprietary position array system, and TEM specimens are extracted by the focused ion beam...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/63247060133105432255 |