Buildup a micro/nano imprint platform with conformable gas press and nanoimprint metallic patterns for surface plasmonicapplication
碩士 === 國立成功大學 === 光電科學與工程研究所 === 97 === In the thesis, nanoimprint lithography was mainly investigated, including hot embossing nanoimprint lithography, ultraviolet cured nanoimprint lithography and soft lithogtraphy. In nanoimprint lithography, resist patterns are created by physically deforming th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63894980098416538514 |