A family-based GA algorithm for scheduling in-line stepper in small-lot scenarios
碩士 === 國立交通大學 === 工業工程與管理系所 === 97 === An in-line stepper, a bottleneck machine in a semiconductor fab, may have capacity loss in a small-lot scenario. In such a machine, a setup or mask change is required in processing jobs with different circuit layouts. Different job sequences may require differe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05266906289942147041 |