Growth and annealing effect of the ZnO thin film on c-sapphire by Atomic Layer Deposition
碩士 === 國立交通大學 === 光電工程系所 === 97 === Structural characteristics of the ZnO epitaxial films grown on c-plane sapphire by atomic layer deposition method were thoroughly studied. The morphology of thin film is smooth. The in-plane axes of the c-plane oriented ZnO layers are predominantly aligned with th...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/15674068378757141151 |