Fabrication of a Capacitance Micromachined Ultrasonic Transducers (CMUTs) by Using Polymer Material
碩士 === 國立交通大學 === 材料科學與工程系所 === 97 === The thesis is to fabricate a polymer-based capacitance micromachined ultrasonic transducer by MEMS technology. The capacitance transducer has a dimension of 11*11mm2 with 70*70 cells inside. Each cell has a diameter of 120μm, membrane diameter of 100μm, top ele...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57333719124149147882 |