A Novel Double-Gated Poly-Si Nanowire Thin Film Transistor and SONOS Memory
碩士 === 國立交通大學 === 電子工程系所 === 97 === In this thesis, a simple and cost-effective method for fabricating poly-Si nanowire (NW) thin film transistor (TFT) without the necessity of advanced lithography tools is proposed and demonstrated. In this scheme, a unique two-step etching is developed to form na...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45359432632450068432 |