Fabrication and Characterizations of Inverse-T Double-Gated Devices with Poly-Si Nanowire Structure

碩士 === 國立交通大學 === 電子工程系所 === 97 === In this thesis, poly-Si nanowires(NWs) with independent double-gated(DG) configuration are fabricated by a simple sidewall spacer techniques. Gate-to-gate coupling effect facilitates the basic electrical characteristics and programming/erasing (P/E) characteristic...

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Bibliographic Details
Main Author: 戴君帆
Other Authors: 林鴻志
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/30213657042430794503