Study on Warping Effect of GaN Thick Films : Origin and Reduction
碩士 === 國立交通大學 === 電子物理系所 === 97 === In this work, we investigated the warping properties of GaN Thick film by HVPE and laser lift-off system. Before LLO, the curvature of hetero-epitaxial GaN varied by different growth conditions, such as the thickness of GaN and substrates, and the percentage of hi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99787985605513037885 |