Electro-Static Light Phase Shifter Array
碩士 === 國立交通大學 === 電機與控制工程系所 === 97 === Two phase shifting micro mirror arrays that can achieve λ/4 vertical displacement and make the mirror peak-to-valley deformation within λ/10 (514nm light source) have been designed, fabricated and tested. These phase shifter arrays are fabricated using TSMC 0.3...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25982815405382673260 |