Fabrication and Characteristics of Cu-metallized InGaP/GaAs HBT
碩士 === 國立交通大學 === 工學院半導體材料與製程產業專班 === 97 === Copper metallization has been extensively used in the silicon industry since IBM announced its success in silicon VLSI process. However, even though copper metallization has become very popular in the fabrication of Si devices, there are only a few report...
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| Format: | Others |
| Language: | en_US |
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2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91127486388405960087 |