Fabrication of Large-area Periodic Arrays of Single-crystalline Silicon Nanorods by Chemical Wet Etching Processes
碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 97 === In the present study, we have demonstrated that large-area, length-tunable arrays of vertically aligned Si nanorod arrays were successfully produced on (001)Si substrates by using the PS nanosphere lithography combined with the Au-assisted selective chemical...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45706381201509235121 |