Light emission from a GaAs(100) target during several keV Ar+ and N2+ ions sputtering
碩士 === 國立中央大學 === 材料科學與工程研究所 === 97 === The interaction of energetic ions with solid surfaces results in the emission of excited ions. The excited particles decay either by a radiationless deexcitation process or by radiative photon emission. In this study, we use 9keV, 6keV and 3keV Ar+ ions and N2...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/a9k23n |