The Composition Analysis of Self-Assembled Si-Ge Quantum Dots by Combination of Atomic Force Microscopy and Selective Chemical Etching

碩士 === 國立中央大學 === 材料科學與工程研究所 === 97 === Recently, self assembled Ge islands have attracted considerable interest for the promising applications in future optoelectronic devices compatible with Si technology. With a moderate lattice mismatch (4.2%), Ge/Si has emerged as a model system for the fabrica...

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Bibliographic Details
Main Authors: Hung-Tai Chang, 張宏臺
Other Authors: Sheng-Wei Lee
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/32363651602737271609