Development of PZT Piezoelectric Sensor for Microbalance
碩士 === 國立中央大學 === 電機工程研究所 === 97 === In this research, microbalance devices were developed with piezoelectric material to measure biomass based on change of resonant frequency. The sensor structure consists of a square piezoelectric PZT thin film. The Pb1.2(Zr0.52Ti0.48)O3 (PZT) thin film was prepar...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/05365324161518550268 |