Ultrasonic Vibration Assisted Electrophoretic Deposition for Machining Microholes in Quartz
碩士 === 國立中央大學 === 機械工程研究所 === 97 === The micro ultrasonic vibration machining（MUSM）is a non-traditional method that able to machining the hardness and brittleness material like quartz. The basic structure of micro-fabrication is the micro-holes which can use to various applications. However, the vib...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77539458045001686127 |