| Summary: | 碩士 === 國立中央大學 === 機械工程研究所 === 97 === The micro ultrasonic vibration machining（MUSM）is a non-traditional method that able to machining the hardness and brittleness material like quartz. The basic structure of micro-fabrication is the micro-holes which can use to various applications. However, the vibration of high frequency during MUSM process causes the abrasive particles impact the workpiece by micro-chipping and filled with micro-craters in micro-holes. Hence, this study attempts to improve the quality of MUSMed micro-holes by a polishing method that combines electrophoretic deposition（EDP）and ultrasonic machining（USM）.
According to the result, the micro ultrasonic vibration machining can be fabricate with suitable parameters in MUSM, such as slurry concentration of 30 Wt%, step accuracy of 0.1µm, federate of 25µm/min, amplitude of 5.4µm and rotational speed of 1000rpm which can obtain accuracy micro-holes. After fabricate of micro-holes has done by MUSM process, the polishing parameters such as amplitude of 6.3µm, polishing time of 30min, rotation speed of 2500rpm and SiC particle size of 0.25µm can successfully finish the micro-holes which reduced the surface roughness from Rmax0.48µm to Rmax0.08µm.
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