Quadrature Homodyne Displacement and Tilt Measuring Interferometer
碩士 === 國立中央大學 === 光電科學研究所 === 97 === This thesis describes a homodyne interferometer that could measure the displacement and tilt of test mirrors. The accuracy of displacement measurement could be enhanced by a novel nonlinearity compensation method. This interferometer adopts quadrature detection s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47121374704590094120 |