| Summary: | 碩士 === 國立中央大學 === 光電科學研究所 === 97 === This thesis describes a homodyne interferometer that could measure the displacement and tilt of test mirrors. The accuracy of displacement measurement could be enhanced by a novel nonlinearity compensation method.
This interferometer adopts quadrature detection system with simpler setup and less system volume. It could measure not only the displacement as usual, but also the tilt motion of target by just a single laser beam.
The phase error compensation method developed in the dissertation could correct nonlinearity efficiently. Compare with the conventional ellipse fitting method, the new method could acquire more accurate result than conventional one under less phase variation and noisy conditions.
Experiment result demonstrates that after applying compensation, the nonlinearity could be compensated correctly. The precision of displacement measurement could achieve to 0.6nm, and the resolution of quadrant detector used for tilt measurement can reach to 2μm.
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