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碩士 === 國立中央大學 === 光電科學研究所 === 97 === In this study, the conductive transparent ZnO:Al (AZO) thin films with 5wt% and 10wt% Al2O3 were deposited at 350 oC by electron-beam evaporator. The optoelectronic characteristics of AZO films were investigated. The resistivity of as-deposited AZO thin films wit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64742708497610673131 |