Investigation of GaN grown on nano-scale patterned GaN template
碩士 === 國立中央大學 === 光電科學研究所 === 97 === The characteristics of GaN-based materials grown on nano-scale patterned GaN template (NPGaN) using self-assemble nickel (Ni) nano-mask by Organometallic Vapor Phase Epitaxy (OMVPE) have been studied. The 3.3-µm-thick un-doped GaN (u-GaN) layer and 4.3-µm-thick n...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/85848793939120586715 |