Study of compound large-scale precision positioning stage
碩士 === 國立中央大學 === 光機電工程研究所 === 97 === In this thesis, the Compound Large-Scale Precision Positioning Stage (CLSP2S) which can reach to millimeter scale moving distance and possesses ability of nanometer scale positioning is developed. This system is based on compound stage, which is consist of piezo...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/84336359977867055312 |