Mechanical Properties Measurement of Nano-Scale Aluminum Films on the Novel Paddle Cantilever Beams Using Laser Deflection
碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === In this paper the test microstructure was designed the triangular cantilever beam and fabricated by the standard C-MOS processes, which can improve stress distribution non-uniform problem and the thickness regime of deposited metal thin film on its surface could...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/47962115320152240914 |