Effect of substrate temperature on nanoscale surface structural and electrical properties of AZO:N films prepared by pulsed laser deposition
碩士 === 國立嘉義大學 === 光電暨固態電子研究所 === 97 === Conducting atomic force microscopy (CAFM) and scanning surface potential microscopy (SSPM) were adopted to investigate the nanoscale surface electrical properties of N-doped aluminum zinc oxide (AZO:N) films that were prepared by pulsed laser deposition (PLD)...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/j4tym7 |