Preparation of p-type ZnO films with different doping methods by DC magnetron sputtering method
碩士 === 國立東華大學 === 材料科學與工程學系 === 97 === We successfully prepared p-type ZnO thin films by arsenic doping and gallium / arsenic codoping using dc magnetron sputtering. We control the doping concentration of ZnO films by target preparation with different dopant concentration. The formation mechanism of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14984233693486120155 |