The Design and Application of 3 Axis Vibrational Chip
碩士 === 國立高雄第一科技大學 === 電子與資訊工程研究所 === 97 === Electronic-Mechanical chip is to integrate the micro Electronic and micro Mechanical techniques on a wafer. This technology is called a MEMS (Micro Electro Mechanical System) process. In this thesis, With MEMS process, we develop a mixing-mode 3D axis vibr...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92896837682854563655 |