The study of mechanical properties of zirconium embedded diamond-like carbon coatings by unbalanced magnetron sputtering
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 97 === Diamond-like-carbon(DLC) film have excellent properties, such as high hardness, low friction coefficient and high thermal conductivity. However, the residual stress actually affects the thin film surface condition apparently. In this study, Zr/ZrC/Zr-DLC fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81921639493307695355 |