Analysis of Material Processing of Sol-Gel Derived PZT and Lower Electrodes to the Performance of Microaccelerometer Applications
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 97 === This study investigated the influence of deposition processes and electrode structures on the thin film properties of Sol-Gel derived lead zirconate titanate (PZT). The feasibility of using lanthanum strontium manganese oxide (LSMO) as electrodes is analyze...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92423502649621298658 |