Study of Microstructure and Photoelectrical Properties for Microcrystalline Silicon Thin Film Prepared by HDP-CVD
碩士 === 國立屏東科技大學 === 材料工程所 === 97 === In this study, the microcrystalline silicon thin films prepared by the high density plasma chemical vapor deposition, can be used to improve the electric property for application in the thin film transistors and solar cell devices. This experiment is designed by...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18788144668568838993 |