Performance Analysis and Improvement of a DC Magnetron Sputtering System
碩士 === 國立中山大學 === 電機工程學系研究所 === 97 === The DC magnetron sputtering system (MSS) is used in microelectronic industries, and is a key device in the thin film depositions manufacturing process. The major influence factors of the DC magnetron sputtering system operational performance such as operational...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/wtu8ne |