Fabrication and Characteristic Optimization of TFBAR Filters
碩士 === 國立中山大學 === 電機工程學系研究所 === 97 === In this study, the ladder-type filters based on back-etched thin film bulk acoustic resonator (TFBAR) were fabricated with several patterns to investigate the influence on their frequency responses. The highly c-axis oriented ZnO films were deposited on silicon...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/r2tcfz |