The Effect of Oxygen Plasma on the Performance of Indium Oxide Thin Film Transistors
碩士 === 國立清華大學 === 光電工程研究所 === 97 === The thin-film transistors (TFTs) is the first field-effect transistor, and it was expected to substitute for the vacuum tube applied in the computer. But the TFT was replaced gradually by the Metal-oxide-semiconductor field-effect transistor which has superior pe...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71891952764264102760 |