利用化學氣相沉積法製備beta-FeSi2
碩士 === 國立清華大學 === 材料科學工程學系 === 97 === In this study, FeSi nanowires were fabricated by chemical vapor deposition method. Beta-FeSi2 nanowires were deposited on Si substrate by applying FeCl3 as precursor at temperature ranged from 700 to 900 ℃. The structure of beta-FeSi2 nanowire was confirmed by X...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/79955564163889997897 |