Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography

博士 === 國立清華大學 === 材料科學工程學系 === 97 ===

Bibliographic Details
Main Authors: Hsieh, Ho-Yen, 謝合彥
Other Authors: Chen, Lih-Juann
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/64818896336121462436