Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography

博士 === 國立清華大學 === 材料科學工程學系 === 97 ===

Bibliographic Details
Main Authors:	Hsieh, Ho-Yen, 謝合彥
Other Authors:	Chen, Lih-Juann
Format:	Others
Language:	en_US
Published:	2009
Online Access:	http://ndltd.ncl.edu.tw/handle/64818896336121462436

id	ndltd-TW-097NTHU5159062
record_format	oai_dc
spelling	ndltd-TW-097NTHU51590622015-11-13T04:08:48Z http://ndltd.ncl.edu.tw/handle/64818896336121462436 Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography 應用反應式離子蝕刻和奈米球微影形成規則的奈米結構 Hsieh, Ho-Yen 謝合彥博士國立清華大學材料科學工程學系 97 Chen, Lih-Juann 陳力俊 2009 學位論文 ; thesis 103 en_US
collection	NDLTD
language	en_US
format	Others
sources	NDLTD
description	博士 === 國立清華大學 === 材料科學工程學系 === 97 ===
author2	Chen, Lih-Juann
author_facet	Chen, Lih-Juann Hsieh, Ho-Yen 謝合彥
author	Hsieh, Ho-Yen 謝合彥
spellingShingle	Hsieh, Ho-Yen 謝合彥 Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography
author_sort	Hsieh, Ho-Yen
title	Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography
title_short	Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography
title_full	Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography
title_fullStr	Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography
title_full_unstemmed	Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography
title_sort	fabrication of nanostructure array by reactive ion etching and nanosphere lithography
publishDate	2009
url	http://ndltd.ncl.edu.tw/handle/64818896336121462436
work_keys_str_mv	AT hsiehhoyen fabricationofnanostructurearraybyreactiveionetchingandnanospherelithography AT xièhéyàn fabricationofnanostructurearraybyreactiveionetchingandnanospherelithography AT hsiehhoyen yīngyòngfǎnyīngshìlízishíkèhénàimǐqiúwēiyǐngxíngchéngguīzédenàimǐjiégòu AT xièhéyàn yīngyòngfǎnyīngshìlízishíkèhénàimǐqiúwēiyǐngxíngchéngguīzédenàimǐjiégòu
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Fabrication of Nanostructure Array by Reactive Ion Etching and Nanosphere Lithography

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