Asymmetric-gap Rotary Comb-drive Actuators for the Application of Vertical-Micromirror Actuation
博士 === 國立清華大學 === 動力機械工程學系 === 97 === Rotary electrostatic comb-drive actuator can achieve the 1 × N channels optical switching by actuating a single vertical micromirror. The first rotary comb-drive actuator presented by Tang et al. in 1989 uses the symmetric-gap comb fingers to generate the electr...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/15333548936845414678 |