Study of Bulge Test, Nano Tensile Tester, and Nanoindentation System for Mechanical Properties Measurement of Thin Films
博士 === 國立清華大學 === 動力機械工程學系 === 97 === The bulge test is a convenient approach to determine the thin film mechanical properties. This study presents a fabrication process to prepare the circular membrane made of metal as well as dielectric films for bulge test. The process successfully combines the d...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35286258751227527601 |